Accurate measurement of atomic chlorine radical density in...

Accurate measurement of atomic chlorine radical density in process plasma with spatially resolvable optical emission spectrometer

Oh, Changhoon, Kang, Minwook, Hahn, Jae Won
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Volume:
16
Language:
english
Journal:
International Journal of Precision Engineering and Manufacturing
DOI:
10.1007/s12541-015-0249-0
Date:
August, 2015
File:
PDF, 271 KB
english, 2015
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