Mechanical characteristics of ultra-long horizontal...

Mechanical characteristics of ultra-long horizontal nanocantilevers grown by real-time feedback control on focused-ion-beam chemical vapour deposition

Guo, Dengji, Warisawa, Shin’ichi, Ishihara, Sunao, Kometani, Reo
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/12/125028
Date:
December, 2015
File:
PDF, 873 KB
english, 2015
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