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[ASME 2007 First International Conference on Integration and Commercialization of Micro and Nanosystems - Sanya, Hainan, China (January 10–13, 2007)] First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B - Finite Element and Experimental Analysis on Micro-Vibration of Ultra Precision Air Bearing Linear Motion Stage and Methods of Its Elimination
Zhang, Ming, Zhu, Yu, Ren, Gexue, Duan, Guanghong, Gao, GuohuaYear:
2007
Language:
english
DOI:
10.1115/mnc2007-21253
File:
PDF, 505 KB
english, 2007