SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Time-average interference microscopy for vibration testing of silicon microelements
Patorski, Krzysztof, Styk, Adam, Sienicki, Zbigniew, Kolacz, Katarzyna, Sochacki, JacekYear:
2012
Language:
english
DOI:
10.1117/12.675761
File:
PDF, 1.66 MB
english, 2012