SPIE Proceedings [SPIE SPIE Microtechnologies - Prague,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Smart ultrasonic sensors systems: investigations on aluminum nitride thin films for the excitation of high frequency ultrasound

Walter, Susan, Herzog, Thomas, Heuer, Henning, Bartzsch, Hagen, Gloess, Daniel, Schmid, Ulrich, Sánchez-Rojas, José Luis, Leester-Schaedel, Monika
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Volume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886852
File:
PDF, 1.41 MB
english, 2011
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