Electrode influence on effective electromechanical coupling coefficient of thin film bulk acoustic resonators
Zhang, R., Jiao, X-Q., Yang, J., Zhong, H., Shi, Y.Volume:
18
Language:
english
Journal:
Materials Research Innovations
DOI:
10.1179/1432891714z.000000000753
Date:
July, 2014
File:
PDF, 158 KB
english, 2014