[ASME ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels - Darmstadt, Germany (June 23–25, 2008)] ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels - Mass Flow Rate Measurements: From Hydrodynamic to Free Molecular Regime

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