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[ASME ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems - Portland, Oregon, USA (July 6–8, 2011)] ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS: Volume 2 - Effect of Crystallographic Quality of Grain Boundaries on Both Mechanical and Electrical Properties of Electroplated Copper Thin Film Interconnections
Murata, Naokazu, Saito, Naoki, Tamakawa, Kinji, Suzuki, Ken, Miura, HideoYear:
2011
Language:
english
DOI:
10.1115/ipack2011-52048
File:
PDF, 2.67 MB
english, 2011