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SPIE Proceedings [SPIE Optoelectronic and Electronic Sensors V - Rzeszow, Poland (Wednesday 5 June 2002)] Optoelectronic and Electronic Sensors V - Analysis of adsorption of alcohol additives in the process of silicon etching in alkaline solutions
Zubel, Irena, Kramkowska, Malgorzata, Kalita, WlodzimierzVolume:
5124
Year:
2003
Language:
english
DOI:
10.1117/12.517059
File:
PDF, 534 KB
english, 2003