Compensation for correlated error in multilayer interferometer
Kim, Yangjin, Hibino, Kenichi, Sugita, Naohiko, Mitsuishi, MamoruVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.000171
Date:
January, 2016
File:
PDF, 858 KB
english, 2016