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Chemical vapour deposition of germanium-containing films by IR laser-induced decomposition of ethoxy(trimethyl)germane
Radek Fajgar, ZdeněK Bastl, Jaroslav Tláskal, Josef PolaVolume:
9
Year:
1995
Language:
english
Pages:
7
DOI:
10.1002/aoc.590090804
File:
PDF, 536 KB
english, 1995