Silicon micromachining in 25 wt% TMAH without and with surfactant concentrations ranging from ppb to ppm
Ashok, Akarapu, Pal, PremLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2699-9
Date:
October, 2015
File:
PDF, 1.34 MB
english, 2015