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Development of compact three-degrees-of-freedom compensation system for geometric errors of an ultra-precision linear axis
Lee, Jae-Chang, Lee, Kwang-Il, Yang, Seung-HanVolume:
99
Language:
english
Journal:
Mechanism and Machine Theory
DOI:
10.1016/j.mechmachtheory.2015.12.015
Date:
May, 2016
File:
PDF, 1.48 MB
english, 2016