[ASME ASME 2013 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Portland, Oregon, USA (Sunday 4 August 2013)] Volume 1: 15th International Conference on Advanced Vehicle Technologies; 10th International Conference on Design Education; 7th International Conference on Micro- and Nanosystems - Low Voltage Electrostatic Actuation for MEMS Actuator Using Frequency Modulation