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[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Measurement of the Size Effect in the Micron-Sized Structures Using the AFM
Ko, Seong-Hyun, Lee, Hun-Kee, Han, Jun-Soo, Park, Hyun ChulVolume:
2005
Year:
2005
Language:
english
DOI:
10.1115/imece2005-80184
File:
PDF, 233 KB
english, 2005