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SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 1 February 2014)] Optical Interconnects XIV - Fabrication of Fresnel micro lens array in borosilicate glass by F 2 -laser ablation for glass interposer application
Schröder, Henning, Chen, Ray T., Glebov, Alexei L., Brusberg, Lars, Neitz, Marcel, Schröder, Henning, Fricke-Begemann, Thomas, Ihlemann, JürgenVolume:
8991
Year:
2014
Language:
english
DOI:
10.1117/12.2040169
File:
PDF, 1.01 MB
english, 2014