Structural defects in SiCxNyHzfilms obtained by...

Journal of Structural Chemistry 2015 / 11 Vol. 56; Iss. 6

Structural defects in SiCxNyHzfilms obtained by plasma-enhanced chemical deposition from hexamethyldisilazane vapor

Shayapov, V. R., Nadolinnyi, V. A., Kozhemyachenko, S. I., Rumyantsev, Yu. M., Fainer, N. I.
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Volume:
56
Language:
english
Journal:
Journal of Structural Chemistry
DOI:
10.1134/S0022476615060074
Date:
November, 2015
File:
PDF, 214 KB
english, 2015
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