Estimation of measurement uncertainty caused by surface gradient for a white light interferometer
Liu, Mingyu, Cheung, Chi Fai, Ren, Mingjun, Cheng, Ching-HsiangVolume:
54
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.54.008670
Date:
October, 2015
File:
PDF, 1.70 MB
english, 2015