Simulation of plastic deformation of sculptured diaphragm...

Microelectronic Engineering 2016 / 02 Vol. 152

Simulation of plastic deformation of sculptured diaphragm silicon microstructure

Jiang, Wanli, Xu, Dehui, Yao, Shaokang, Xiong, Bin, Wang, Yuelin
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Volume:
152
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.12.011
Date:
February, 2016
File:
PDF, 1.41 MB
english, 2016
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