Silicon MEMS acceleration switch with high reliability...

Microelectronic Engineering 2016 / 02 Vol. 152

Silicon MEMS acceleration switch with high reliability using hooked latch

Lee, Yeonsu, Sim, Sung-Min, Kim, Hyunseok, Kim, Yong-Kweon, Kim, Jung-Mu
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Volume:
152
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.12.016
Date:
February, 2016
File:
PDF, 2.62 MB
english, 2016
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