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Analytical study and compensation for temperature drifts of a bulk silicon MEMS capacitive accelerometer
He, Jiangbo, Xie, Jin, He, Xiaoping, Du, Lianming, Zhou, WuVolume:
239
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.01.026
Date:
March, 2016
File:
PDF, 3.16 MB
english, 2016