Resistivity of epitaxial copper nanolines with trapezoidal cross-section
Lu, Zonghuan, Frey, David M., Merkh, Thomas, Lord, Robert, Washington, Morris A., Lu, Toh-MingVolume:
599
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.12.063
Date:
January, 2016
File:
PDF, 1.18 MB
english, 2016