[ASME ASME 2005 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, California, USA (September 24–28, 2005)] Volume 1: 20th Biennial Conference on Mechanical Vibration and Noise, Parts A, B, and C - Dynamic Analysis of the Nonlinear Behavior of Capacitive MEMS Using the Finite Element Formulation

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