[ASME ASME 2003 International Mechanical Engineering Congress and Exposition - Washington, DC, USA (November 15–21, 2003)] Microelectromechanical Systems - Dynamic Modeling and Design of a High Frequency Micro Vacuum Pump
Astle, Aaron, Bernal, Luis P., Washabaugh, Peter, Kim, Hanseup, Najafi, KhalilVolume:
2003
Year:
2003
Language:
english
DOI:
10.1115/imece2003-41493
File:
PDF, 670 KB
english, 2003