![](/img/cover-not-exists.png)
[ASME ASME 2011 International Mechanical Engineering Congress and Exposition - Denver, Colorado, USA (November 11–17, 2011)] Volume 11: Nano and Micro Materials, Devices and Systems; Microsystems Integration - Conception and Fabrication of Silicon Ring Resonator With Piezo-Resistive Detection for Force Sensing Applications
Xiong, Zhuang, Walter, Benjamin, Mairiaux, Estelle, Faucher, Marc, Buchaillot, Lionel, Legrand, BernardYear:
2011
Language:
english
DOI:
10.1115/imece2011-65083
File:
PDF, 1.37 MB
english, 2011