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SPIE Proceedings [SPIE International Conference on Optical and Photonic Engineering (icOPEN2015) - Singapore, Singapore (Tuesday 14 April 2015)] International Conference on Optical and Photonic Engineering (icOPEN 2015) - Extreme ultraviolet light sources and soft x-ray laser based on discharge produced plasma
Asundi, Anand K., Fu, Yu, Hotta, Eiki, Sakai, Yusuke, Hayashi, Yasushi, Niimi, Gohta, Huang, Bin, Zhu, Qiushi, Song, Inho, Watanabe, MasatoVolume:
9524
Year:
2015
Language:
english
DOI:
10.1117/12.2195258
File:
PDF, 561 KB
english, 2015