SPIE Proceedings [SPIE Seventh International Symposium on Precision Mechanical Measurements - Xia'men, China (Saturday 8 August 2015)] Seventh International Symposium on Precision Mechanical Measurements - Parallel common path phase-shifting interferometer with a digital reflective grating
Yu, Liandong, Bai, Hongyi, Shan, Mingguang, Zhong, Zhi, Guo, Lili, Zhang, YabinVolume:
9903
Year:
2016
Language:
english
DOI:
10.1117/12.2211285
File:
PDF, 578 KB
english, 2016