Deposition of copper coatings in a magnetron with liquid...

Physics of Atomic Nuclei 2015 / 12 Vol. 78; Iss. 14

Deposition of copper coatings in a magnetron with liquid target

Tumarkin, A. V., Kaziev, A. V., Kolodko, D. V., Pisarev, A. A., Kharkov, M. M., Khodachenko, G. V.
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Volume:
78
Language:
english
Journal:
Physics of Atomic Nuclei
DOI:
10.1134/S1063778815140136
Date:
December, 2015
File:
PDF, 889 KB
english, 2015
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