Optimization of loss tangent and capacitor size of...

Microelectronics Journal 2015 / 12 Vol. 46; Iss. 12

Optimization of loss tangent and capacitor size of micro-vacuum dielectric capacitors

Tam, Wing-Shan, Kok, Chi-Wah, Wong, Hei
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Volume:
46
Language:
english
Journal:
Microelectronics Journal
DOI:
10.1016/j.mejo.2015.09.019
Date:
December, 2015
File:
PDF, 857 KB
english, 2015
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