Self-limiting atomic layer deposition of barium oxide and...

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Journal of Materials Chemistry C 2016

Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor

Acharya, Shinjita, Torgersen, Jan, Kim, Yongmin, Park, Joonsuk, Schindler, Peter, Dadlani, Anup L., Winterkorn, Martin, Xu, Shicheng, Walch, Stephen P., Usui, Takane, Schildknecht, Christian, Prinz, F
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Year:
2016
Language:
english
Journal:
J. Mater. Chem. C
DOI:
10.1039/C5TC03561A
File:
PDF, 3.68 MB
english, 2016
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