[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Design and fabrication of SiO2 waveguide-based SAW sensors with filled microcavities
Li, Shuangming, Richardson, Mandek, Sankaranarayanan, Subramanian K. R. S., Fan, Chunhai, Su, Yan, Bhethanabotla, Venkat R.Year:
2015
Language:
english
DOI:
10.1109/ICSENS.2015.7370217
File:
PDF, 809 KB
english, 2015