Stable Encapsulated Charge-Biased Resonators

Ng, Eldwin J., Harrison, Kimberly L., Yang, Yushi, Ahn, Chae Hyuck, Hong, Vu A., Howe, Roger T., Kenny, Thomas W.

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Year:

2015

Language:

english

Journal:

Journal of Microelectromechanical Systems

DOI:

10.1109/JMEMS.2015.2483365

File:

PDF, 3.36 MB

english, 2015

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