MEMS-Based Tunable Fabry-Perot Filters for Adaptive...

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Journal of Microelectromechanical Systems 2016

MEMS-Based Tunable Fabry-Perot Filters for Adaptive Multispectral Thermal Imaging

Mao, Haifeng, Silva, K. K. M. B. Dilusha, Martyniuk, Mariusz, Antoszewski, Jarek, Bumgarner, John, Nener, Brett D., Dell, John M., Faraone, Lorenzo
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Year:
2016
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2509058
File:
PDF, 3.11 MB
english, 2016
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