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Diagnostics of Plasma Processes Based on Parallelized Spatially Resolved In-Situ Reflection Measurements
Schulz, Christian, Runkel, Jan, Oberberg, Moritz, Awakowicz, Peter, Rolfes, IlonaYear:
2016
Language:
english
Journal:
IEEE Transactions on Microwave Theory and Techniques
DOI:
10.1109/TMTT.2015.2510653
File:
PDF, 2.09 MB
english, 2016