[ASME ASME 2004 International Mechanical Engineering Congress and Exposition - Anaheim, California, USA (November 13 – 19, 2004)] Microelectromechanical Systems - Mechanical Brakes for Electrostatic Actuators
Grade, John D., Yasumura, Kevin Y., Jerman, HalVolume:
2004
Year:
2004
Language:
english
DOI:
10.1115/imece2004-60788
File:
PDF, 1.25 MB
english, 2004