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[ASME ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference - San Francisco, California, USA (July 17–22, 2005)] Advances in Electronic Packaging, Parts A, B, and C - Development of 1D Optical Micro Scanner Driven by Piezoelectric Actuators
Kobayashi, Takeshi, Tsaur, Jiunnjye, Maeda, RyutaroYear:
2005
Language:
english
DOI:
10.1115/ipack2005-73431
File:
PDF, 462 KB
english, 2005