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SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices, and Applications - Sydney, New South Wales, Australia (Sunday 6 December 2015)] Micro+Nano Materials, Devices, and Systems - Calculation of the dynamic characteristics of micro-mirror element based on thermal micro-actuators
Eggleton, Benjamin J., Palomba, Stefano, Evstafyev, Sergey S., Timoshenkov, Sergey P., Samoilykov, Vyacheslav K., Korobova, Natalia E., Timoshenkov, Alexey S., Tereshhenko, Anatolij M.Volume:
9668
Year:
2015
Language:
english
DOI:
10.1117/12.2202444
File:
PDF, 403 KB
english, 2015