![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Selected Proceedings of the Chinese Society for Optical Engineering Conferences held November 2015 - Various, China (Sunday 15 November 2015)] Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015 - Influence of deposition parameters on residual stress of YbF 3 thin film
Bao, Weimin, Lv, Yueguang, Zhang, Yao-ping, Fan, Jun-qi, Long, Guo-yunVolume:
9796
Year:
2016
Language:
english
DOI:
10.1117/12.2228239
File:
PDF, 540 KB
english, 2016