Nanoscale patterning with block copolymers

Nanoscale patterning with block copolymers

Sivashankar Krishnamoorthy, Christian Hinderling, Harry Heinzelmann
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Volume:
9
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/s1369-7021(06)71621-2
File:
PDF, 2.35 MB
english, 2006
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