SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Self-aligned single-mask fabrication process for electro-thermal microactuators using ICP-RIE
Alamin Dow, Ali B., Gougam, Adel, Kherani, Nazir P., Rangelow, I. W., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2015547
File:
PDF, 948 KB
english, 2013