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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures
Balke, M., Peiner, E., Doering, L., Becker, Thomas, Cané, Carles, Barker, N. ScottVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.724163
File:
PDF, 1.43 MB
english, 2007