Study of diffusion barrier properties of ternary alloy (TixAlyNz) in Cu/TixAlyNz/SiO2/Si thin film structure
Y.K. Lee, Khin Maung Latt, Thomas Osipowicz, Cham Sher-YiVolume:
3
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s1369-8001(00)00031-7
File:
PDF, 149 KB
english, 2000