Technological processes and modeling of...

Materials Science in Semiconductor Processing 2000 Vol. 3; Iss. 5-6

Technological processes and modeling of opto-electro-mechanical microstructures

Raluca Muller, V Moagar Poladian, I Pavelescu, Elena Manea, Dana Cristea, Paula Obreja
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Volume:
3
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s1369-8001(00)00068-8
File:
PDF, 426 KB
english, 2000
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