Epitaxial growth of SiGe layers for BiCMOS applications
J.L. Regolini, J. Pejnefors, T. Baffert, C. Morin, P. Ribot, S. Jouan, M. Marty, A. ChantreVolume:
1
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s1369-8001(98)00025-0
File:
PDF, 640 KB
english, 1998