Low-temperature deposition of titanium nitride films from dialkylhydrazine-based precursors
Joseph T. Scheper, Peggy J. McKarns, T.Suren Lewkebandara, Charles H. WinterVolume:
2
Year:
1999
Language:
english
Pages:
9
DOI:
10.1016/s1369-8001(99)00012-8
File:
PDF, 171 KB
english, 1999