Micromachining of three-dimensional silicon structures...

Micromachining of three-dimensional silicon structures using photoelectrochemical etching

Tenerz, L., Hök, B.
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Volume:
21
Year:
1985
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19850851
File:
PDF, 439 KB
english, 1985
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