[ASME ASME 2003 International Mechanical Engineering Congress and Exposition - Washington, DC, USA (November 15–21, 2003)] Microelectromechanical Systems - A Batch Fabricated Linear Synchronous Motor
Föhse, Martin, Stölting, Hans-D., Edler, Jens, Gatzen, Hans H.Volume:
2003
Year:
2003
Language:
english
DOI:
10.1115/imece2003-41388
File:
PDF, 829 KB
english, 2003