Fabrication of microlens array on silicon surface using electrochemical wet stamping technique
Lai, Lei-Jie, Zhou, Hang, Zhu, Li-MinVolume:
364
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.12.085
Date:
February, 2016
File:
PDF, 1.56 MB
english, 2016