Fabrication of microlens array on silicon surface using...

Fabrication of microlens array on silicon surface using electrochemical wet stamping technique

Lai, Lei-Jie, Zhou, Hang, Zhu, Li-Min
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Volume:
364
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.12.085
Date:
February, 2016
File:
PDF, 1.56 MB
english, 2016
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