405nm laser processing of thin SU-8 polymer film

Optik - International Journal for Light and Electron Optics 2016 / 02 Vol. 127; Iss. 4

405nm laser processing of thin SU-8 polymer film

Cheong, Y.K., Lim, W.H., Lee, S.H., Pua, C.H., Chong, W.Y., Ahmad, H.
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Volume:
127
Language:
english
Journal:
Optik - International Journal for Light and Electron Optics
DOI:
10.1016/j.ijleo.2015.11.057
Date:
February, 2016
File:
PDF, 745 KB
english, 2016
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