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High-brightness laser-induced EUV source based on tin plasma with an unlimited lifetime of electrodes
Vinokhodov, A Yu, Krivtsun, V M, Lash, A A, Borisov, V M, Yakushev, O F, Koshelev, K NVolume:
46
Language:
english
Journal:
Quantum Electronics
DOI:
10.1070/QE2016v046n01ABEH015657
Date:
January, 2016
File:
PDF, 1.95 MB
english, 2016